Confocal Sensor Systems
Dedicated to measuring wafer semiconductor materials including Si, SiC, Sapphire, GaS, GaN, Glass, Quartz and many other transparent and opaque substrates, thickness, warpage, TTV
Flatness/parallelism/thickness/surface profile of transparent materials such as plastic/glass; Flatness/surface profile of opaque materials such as ceramics/plastics/metals
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